photolithography processing systems

for markets such as semiconductor, MEMS, glass and optical component industries and flat panel industries.


Osiris International is a manufacturer of machines specializing in photolithographic process equipment used in semiconductor and microsystems (MEMS) technology.

All of our systems are designed exclusively for processing single substrates and are equipped with our in-house, user-friendly control panel with all the necessary features such as recipe programming, service, maintenance and user management.

Depending on customer requirements, the wafer handling is adapted for traditional silicon wafers or advanced compound semiconductor substrates (Si, SiC, GaAs, glass, a.o.). 

The use of proprietary chucks, inlays and end-effectors allows for the processing and handling of customer-specific substrates in a targeted manner, thus guaranteeing optimal results.

Our in-house design, engineering and manufacturing teams work together to customize and quickly implement technically demanding and complex customer requirements.

In addition to the production of our machines, which range from manual laboratory systems to fully automated cluster systems, we also offer components (e.g. chucks, end-effectors) and sub-systems (e.g. dispense systems, media supply cabinets with various canister designs).

We supply our technologies worldwide to major semiconductor manufacturers and internationally renowned research and development institutions.

Our application areas

Products range from
bench mounted or table top R&D systems to automated
cassette to cassette
high volume production.

Our next upcoming events 2021

Visit Osiris International at one of our next trade fair participations. We are looking forward to your visit.




SEMI is the global industry association serving the manufacturing supply chain for the micro- and nano-electronics industries.


The largest industry association in Europe.